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Imaging of in- and out-of-plane vibrations in micromechanical resonator

  • Olli Holmgren
  • , Kimmo Kokkonen
  • , T. Mattila
  • , V. Kaajakari
  • , A. Oja
  • , J. Kiihamäki
  • , Jouni V. Knuuttila
  • , Martti M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)16
JournalElectronics Letters
Volume41
Issue number3
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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