Imaging of in- and out-of-plane vibrations in micromechanical resonator

Olli Holmgren, Kimmo Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamäki, Jouni V. Knuuttila, Martti M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)16
JournalElectronics Letters
Volume41
Issue number3
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

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