Imaging of 3D vibrations in a MEMS RF-resonator

Olli Holmgren; Kimmo Kokkonen; Tomi Mattila; Ville Kaajakari; Aarne Oja; Jyrki Kiihamäki; Jouni V. Knuuttila; Martti M. Salomaa

Imaging of 3D vibrations in a MEMS RF-resonator

Olli Holmgren, Kimmo Kokkonen, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jyrki Kiihamäki, Jouni V. Knuuttila, Martti M. Salomaa

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Fysiikan päivät, Espoo, 17 - 19.3.2005
Pages	348
Publication status	Published - 2005
MoE publication type	A4 Conference publication

Cite this

@inproceedings{e6cfb04a1ac8446cb03880e42b23b4d6,

title = "Imaging of 3D vibrations in a MEMS RF-resonator",

author = "Olli Holmgren and Kimmo Kokkonen and Tomi Mattila and Ville Kaajakari and Aarne Oja and Jyrki Kiiham{\"a}ki and Knuuttila, {Jouni V.} and Salomaa, {Martti M.}",

year = "2005",

language = "English",

pages = "348",

booktitle = "Fysiikan p{\"a}iv{\"a}t, Espoo, 17 - 19.3.2005",

}