Hydrophilic patterning of hydrophobic zinc-oxide films using UV excimer laser

Ville Kekkonen, Jari Malm, Elina Sahramo, Antti Hakola, Timo Kajava, Maarit Karppinen, Robin Ras

Research output: Working paperProfessional

Original languageEnglish
Pages138
Publication statusPublished - 2008
MoE publication typeD4 Published development or research report or study

Publication series

NameXLII Annual Conference of the Finnish Physical Society, Turku 27.-29.3.2008

Keywords

  • atomic layer deposition (ALD)
  • patterning
  • UV laser
  • wettability
  • zinc oxide

Cite this