Hybrid microassembly for massively parallel assembly of microchips with water mist

Bo Chang, Antti Virta, Quan Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationThe Second International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO 2012), Xi'an, China, 29 August 1 September 2012
Place of PublicationXi'an, China
PublisherXi'an Technological University
Pages6
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication

Keywords

  • hybrid microassembly
  • microassembly
  • microchips
  • self-assembly
  • water mist

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