@inproceedings{8516a19f7d594b0fa3321b9aed38cf8c,
title = "Hybrid microassembly for 3D integration and heterogenous integration of microsystem - EU FP7 Project FAB2ASM",
author = "Quan Zhou",
note = "VK: T40102",
year = "2013",
language = "English",
publisher = "VDE Verlag GmbH",
pages = "8",
editor = "T. Gessner",
booktitle = "7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Amsterdam, The Netherlands, 13-14 March 2013",
address = "Germany",
}