Hybrid microassembly for 3D integration and heterogenous integration of microsystem - EU FP7 Project FAB2ASM

Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

Original languageEnglish
Title of host publication7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Amsterdam, The Netherlands, 13-14 March 2013
EditorsT. Gessner
Place of PublicationAmsterdam, The Netherlands
PublisherVDE Verlag
Pages8
ISBN (Electronic)978-3-8007-3490-0
Publication statusPublished - 2013
MoE publication typeD3 Professional conference proceedings

Publication series

Name
PublisherVDE VERLAG GMBH
ISSN (Electronic)1432-3419

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