Hybrid microassembly combining laser die transfer and capillary self-alignment

Bo Chang, Mikko Koverola, Zhenghao Ge, Quan Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

Laser die transfer technique provides an efficient solution for fast transportation of microchips in microassembly. Capillary self-alignment is able to achieve parallel and high-accuracy alignment of microchips on receptor sites. In this paper, we propose a new hybrid microassembly strategy, which combines laser die transfer and capillary self-alignment techniques. The laser die transfer technique was used for the coarse positioning of microchips and the capillary self-assembly technique was applied to achieve high-accuracy alignment. A low-power and low-cost laser device was investigated in laser die transfer process and hydrophilic/superhydrophobic patterned surfaces were fabricated and served as receptor sites. Microscopic droplets were introduced as the media for capillary self-alignment. The results show that the microchip can be selectively released and self-aligned with the corresponding receptor site. The proposed method could be useful for high-throughput, high-accuracy and fully-automatic assembly in construction of miniature devices.
Original languageEnglish
Title of host publication2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
PublisherIEEE
Number of pages4
ISBN (Electronic) 978-1-5386-0346-8
ISBN (Print)978-1-5386-0347-5
DOIs
Publication statusPublished - 8 Aug 2017
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Manipulation, Automation and Robotics at Small Scales - University of Montreal, Montreal, Canada
Duration: 17 Jul 201721 Jul 2017
http://marss-conference.org/

Conference

ConferenceInternational Conference on Manipulation, Automation and Robotics at Small Scales
Abbreviated titleMARSS
Country/TerritoryCanada
CityMontreal
Period17/07/201721/07/2017
Internet address

Keywords

  • laser die transfer
  • capillary self-alignment
  • hydrophilic/superhydrophobicpatterned surface
  • microasssembly

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