Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

V. Heikkinen; K. Hanhijärvi; J. Aaltonen; H. Räikkönen; B. Wälchli; T. Paulin; I. Kassamakov; K. Grigoras; S. Franssila; E. Hæggström

doi:10.1117/12.889362

Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

V. Heikkinen
, K. Hanhijärvi
, J. Aaltonen
, H. Räikkönen
, B. Wälchli
, T. Paulin
, I. Kassamakov
, K. Grigoras
, S. Franssila
, E. Hæggström

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	SPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011
DOIs	https://doi.org/10.1117/12.889362
Publication status	Published - 2011
MoE publication type	A4 Conference publication

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10.1117/12.889362

Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility

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@inproceedings{672e8c76299e4c12b980c201d5c077d0,

title = "Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control",

author = "V. Heikkinen and K. Hanhij{\"a}rvi and J. Aaltonen and H. R{\"a}ikk{\"o}nen and B. W{\"a}lchli and T. Paulin and I. Kassamakov and K. Grigoras and S. Franssila and E. H{\ae}ggstr{\"o}m",

year = "2011",

doi = "10.1117/12.889362",

language = "English",

booktitle = "SPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011",

}

TY - GEN

T1 - Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

AU - Heikkinen, V.

AU - Hanhijärvi, K.

AU - Aaltonen, J.

AU - Räikkönen, H.

AU - Wälchli, B.

AU - Paulin, T.

AU - Kassamakov, I.

AU - Grigoras, K.

AU - Franssila, S.

AU - Hæggström, E.

PY - 2011

Y1 - 2011

U2 - 10.1117/12.889362

DO - 10.1117/12.889362

M3 - Conference article in proceedings

BT - SPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011

ER -

Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

Access to Document

Equipment

Raw Materials Research Infrastructure

Cite this