Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, H. Räikkönen, B. Wälchli, T. Paulin, I. Kassamakov, K. Grigoras, S. Franssila, E. Hæggström

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Title of host publicationSPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011
DOIs
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication

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