HSQ resist for replication stamp in polymers

M.R. Saleem, P.A. Stenberg, M.B. Khan, Z.M. Khan, S. Honkanen, Jari Turunen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V, San Francisco, CA, 24 January 2012 - 25 January 2012
    Subtitle of host publicationConference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA4 Article in a conference publication

    Publication series

    NameProceedings of SPIE
    Volume8249
    ISSN (Print)0277-786X

    Keywords

    • Hsq
    • Nano-imprint lithography
    • Nano-scale devices
    • Sub-wavelength gratings

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