Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Anish Philip; Umaid Lone; Olga Partanen; Eero Haimi; Maarit Karppinen

doi:10.1039/d4cc05425c

Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Anish Philip, Umaid Lone, Olga Partanen, Eero Haimi, Maarit Karppinen^*

^*Corresponding author for this work

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Abstract

Thin-film deposition using sustainable precursors is required for various next-generation green energy applications. Here we report two atomic/molecular layer deposition processes for appreciably stable and conformal Ti-organic thin films and TiO₂:organic superlattices with potential in e.g. battery, photocatalysis and thermoelectric applications. These processes are based on the safe and sustainable titanium isopropoxide as the titanium precursor.

Original language	English
Pages (from-to)	917-920
Number of pages	4
Journal	Chemical Communications
Volume	61
Issue number	5
Early online date	6 Dec 2024
DOIs	https://doi.org/10.1039/d4cc05425c
Publication status	Published - 16 Jan 2025
MoE publication type	A1 Journal article-refereed

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CHEM_Philip_et_al_Highly_stable_2025_Chem_CommunFinal published version, 976 KBLicence: CC BY

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abstract = "Thin-film deposition using sustainable precursors is required for various next-generation green energy applications. Here we report two atomic/molecular layer deposition processes for appreciably stable and conformal Ti-organic thin films and TiO2:organic superlattices with potential in e.g. battery, photocatalysis and thermoelectric applications. These processes are based on the safe and sustainable titanium isopropoxide as the titanium precursor.",

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AU - Karppinen, Maarit

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AB - Thin-film deposition using sustainable precursors is required for various next-generation green energy applications. Here we report two atomic/molecular layer deposition processes for appreciably stable and conformal Ti-organic thin films and TiO2:organic superlattices with potential in e.g. battery, photocatalysis and thermoelectric applications. These processes are based on the safe and sustainable titanium isopropoxide as the titanium precursor.

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Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

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CHEMI-SEMI: New chemistries for resource efficient semiconductor manufacturing

UniEn-MLD: Unique ALD/MLD-Enabled Material Functions

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Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications

Abstract

UN SDGs

Access to Document

Other files and links

Fingerprint

Projects

CHEMI-SEMI: New chemistries for resource efficient semiconductor manufacturing

UniEn-MLD: Unique ALD/MLD-Enabled Material Functions

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OtaNano

OtaNano - Nanomicroscopy Center

Raw Materials Research Infrastructure

Cite this