High-tempereture silicon microbridge actuator

Lauri Sainiemi, Kestutis Grigoras, Ji Fan, Ville Saarela, Ville Vähänissi, Aki Laakso, Sami Franssila

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2008
MoE publication type	D4 Published development or research report or study

Name	Eurosensors 2008, Dresden

Cite this

@techreport{fb9f734bf17f4b03b09c9b39ca7b04f9,

title = "High-tempereture silicon microbridge actuator",

author = "Lauri Sainiemi and Kestutis Grigoras and Ji Fan and Ville Saarela and Ville V{\"a}h{\"a}nissi and Aki Laakso and Sami Franssila",

year = "2008",

language = "English",

series = "Eurosensors 2008, Dresden",

type = "WorkingPaper",

}