High-tempereture silicon microbridge actuator

Lauri Sainiemi, Kestutis Grigoras, Ji Fan, Ville Saarela, Ville Vähänissi, Aki Laakso, Sami Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameEurosensors 2008, Dresden

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