High-Speed Metal-Semiconductor-Metal Photodetectors Fabricated on SOI-Substrates

K. Honkanen, N. Hakkarainen, K. Määttä, A. Kilpelä, P. Kuivalainen

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)127-130
JournalPhysica Scripta
VolumeT79
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Keywords

  • High-Speed
  • MSM
  • SOI

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