@techreport{4aab0f3ac38a41c39e4057c28c367c6b,
title = "High-speed Metal - Semiconductor - Metal Photodetectors Fabricated on Si- and SOI-substrates",
keywords = "MSM photodetector, Si, SOI, MSM photodetector, Si, SOI, MSM photodetector, Si, SOI",
author = "K. Honkanen and N. Hakkarainen and S. Er{\"a}nen and S. Tammela and V. Sokolov and J. Ahopelto and P. Kuivalainen",
year = "1997",
language = "English",
series = "URSI, Oulu 20-21.11.1997",
publisher = "University of Oulu",
pages = "158",
type = "WorkingPaper",
institution = "University of Oulu",
}