High-speed Metal - Semiconductor - Metal Photodetectors Fabricated on Si- and SOI-substrates

K. Honkanen, N. Hakkarainen, S. Eränen, S. Tammela, V. Sokolov, J. Ahopelto, P. Kuivalainen

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationOulu
Publication statusPublished - 1997
MoE publication typeD4 Published development or research report or study

Publication series

NameURSI, Oulu 20-21.11.1997
PublisherUniversity of Oulu


  • MSM photodetector
  • Si
  • SOI

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