High resolution laser-interferometric probing of SAW devices

J.V. Knuuttila, P. Tikka, T. Thorvaldsson, K. Hashimoto, M.M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Title of host publication1998 IEEE Ultrasonics Symposium, Sendai, Japan, October 5-8, 1998
    EditorsS.C. Schneider, M. Levy, B.R. McAvoy
    Place of PublicationPiscataway
    PublisherIEEE
    Pages235-238
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • laser-interferometric probing
    • SAW

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