High Resolution Analog Interface for Micromachined Capacitive Accelerometer

Lasse Aaltonen, Pasi Rahikkala, Mikko Saukoski, Kari Halonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationEuropean Conference on Circuit Theory and Design (ECCTD) 2007, Sevilla, Spain, 26-30, Aaugust 2007
    Pages96-99
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • accelerometer
    • closed-loop
    • servo

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