High-quality slot waveguide ring resonator based on atomic layer deposition

Anton Autere, Lasse Karvonen, Antti Säynätjoki, Matthieu Roussey, Elina Färm, Marianna Kemell, Xiaoguang Tu, Tsung-Yang Liow, Guo-Qiang Lo, Mikko Ritala, Markku Leskelä, Seppo Honkanen, Zhipei Sun

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

1 Citation (Scopus)
Original languageEnglish
Title of host publicationSilicon photonics x
PublisherSPIE - The International Society for Optical Engineering
Pages0000093671
Publication statusPublished - 2015
MoE publication typeB3 Non-refereed article in conference proceedings

Publication series

Name
PublisherInternational Society for Optical Engineering
ISSN (Print)0277-786X

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