@inproceedings{e895ff12e5ef4f0caae749799b07a7a6,
title = "High-quality slot waveguide ring resonator based on atomic layer deposition",
author = "Anton Autere and Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Matthieu Roussey and Elina F{\"a}rm and Marianna Kemell and Xiaoguang Tu and Tsung-Yang Liow and Guo-Qiang Lo and Mikko Ritala and Markku Leskel{\"a} and Seppo Honkanen and Zhipei Sun",
year = "2015",
language = "English",
publisher = "SPIE",
pages = "0000093671",
booktitle = "Silicon photonics x",
address = "United States",
}