High-quality silicon slot waveguide ring resonator filled by atomic layer deposition

Anton Autere, Lasse Karvonen, Antti Säynätjoki, M. Roussey, E. Färm, M. Kemell, X. Tu, T.Y. Liow, G.Q. Lo, M. Ritala, M. Leskelä, Seppo Honkanen, Zhipei Sun

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publicationEOSAM 2014, Berlin, Germany, September 15-19, 2014
Publication statusPublished - 2014
MoE publication typeB3 Non-refereed article in conference proceedings

Cite this

Autere, A., Karvonen, L., Säynätjoki, A., Roussey, M., Färm, E., Kemell, M., Tu, X., Liow, T. Y., Lo, G. Q., Ritala, M., Leskelä, M., Honkanen, S., & Sun, Z. (2014). High-quality silicon slot waveguide ring resonator filled by atomic layer deposition. In EOSAM 2014, Berlin, Germany, September 15-19, 2014