High Quality Factor Graphene-Based Two-Dimensional Heterostructure Mechanical Resonator

M. Will, M. Hamer, M. Müller, A. Noury, P. Weber, A. Bachtold, R. V. Gorbachev, C. Stampfer*, J. Güttinger

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

60 Citations (Scopus)


Ultralight mechanical resonators based on low-dimensional materials are well suited as exceptional transducers of minuscule forces or mass changes. However, the low dimensionality also provides a challenge to minimize resistive losses and heating. Here, we report on a novel approach that aims to combine different two-dimensional (2D) materials to tackle this challenge. We fabricated a heterostructure mechanical resonator consisting of few layers of niobium diselenide (NbSe2) encapsulated by two graphene sheets. The hybrid membrane shows high quality factors up to 245,000 at low temperatures, comparable to the best few-layer graphene mechanical resonators. In contrast to few-layer graphene resonators, the device shows reduced electrical losses attributed to the lower resistivity of the NbSe2 layer. The peculiar low-temperature dependence of the intrinsic quality factor points to dissipation over two-level systems which in turn relax over the electronic system. Our high sensitivity readout is enabled by coupling the membrane to a superconducting cavity which allows for the integration of the hybrid mechanical resonator as a sensitive and low loss transducer in future quantum circuits.

Original languageEnglish
Pages (from-to)5950-5955
Number of pages6
JournalNano Letters
Issue number10
Publication statusPublished - 11 Oct 2017
MoE publication typeA1 Journal article-refereed


  • 2D heterostructures
  • cavity readout
  • graphene
  • Mechanical resonator
  • NbSe2
  • NEMS


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