High quality crystallinity controlled ALD TiO2 for waveguiding applications

Research output: Contribution to journalArticle


  • Tapani Alasaarela
  • Lasse Karvonen
  • Henri Jussila
  • Antti Säynätjoki
  • Soroush Mehravar
  • Robert A. Norwood
  • Nasser Peyghambarian
  • Khanh Kieu
  • Ilkka Tittonen

  • Harri Lipsanen

Research units

  • University of Arizona


Original languageEnglish
Pages (from-to)3980-3983
Number of pages4
JournalOptics Letters
Issue number20
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

ID: 917079