@article{36350dbff52f448d91792579f39cee57,
title = "High quality crystallinity controlled ALD TiO2 for waveguiding applications",
author = "Tapani Alasaarela and Lasse Karvonen and Henri Jussila and Antti S{\"a}yn{\"a}tjoki and Soroush Mehravar and Norwood, \{Robert A.\} and Nasser Peyghambarian and Khanh Kieu and Ilkka Tittonen and Harri Lipsanen",
year = "2013",
doi = "10.1364/OL.38.003980",
language = "English",
volume = "38",
pages = "3980--3983",
journal = "Optics Letters",
issn = "0146-9592",
publisher = "Optica Publishing Group",
number = "20",
}