High-Q micromechanical silicon oscillators

K. Nera, O. Hahtela, M. Kujala, K. Lahti, T. Lamminmäki, K. Ruokonen, V. Voipio, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationXXII International Conference on Low Temperature Physics, Helsinki, Finland, August 4-11, 1999
Pages616
Publication statusPublished - 1999
MoE publication typeA4 Article in a conference publication

Keywords

  • high-q
  • micromechanics
  • silicon oscillators

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