High-Q micromechanical length extensional mode resonator

Pekka Rantakari, Mika Koskenvuori, Tuomas Lamminmäki, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the XXXVI annual conference of the Finnish Physical Society
EditorsJani Tervo, Pertti Pääkkönen, Markku Kuittinen
PublisherUniversity of Joensuu
ISBN (Print)952-458-110-8
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication
EventPhysics Days: Annual Meeting of the Finnish Physical Society - Joensuu, Finland
Duration: 14 Mar 200216 Mar 2002
Conference number: 36

Publication series

NameXXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002
NameSelected papers / University of Joensuu, Department of Physics
PublisherUniversity of Joensuu
Number7
ISSN (Print)1236-0376

Conference

ConferencePhysics Days
CountryFinland
CityJoensuu
Period14/03/200216/03/2002

Keywords

  • High Q-value
  • resonator
  • RF-MEMES

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