High-Q micromechanical length extensional mode resonator

Pekka Rantakari; Mika Koskenvuori; Tuomas Lamminmäki; Ilkka Tittonen

High-Q micromechanical length extensional mode resonator

Pekka Rantakari, Mika Koskenvuori, Tuomas Lamminmäki, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the XXXVI annual conference of the Finnish Physical Society
Editors	Jani Tervo, Pertti Pääkkönen, Markku Kuittinen
Publisher	University of Joensuu
ISBN (Print)	952-458-110-8
Publication status	Published - 2002
MoE publication type	A4 Conference publication
Event	Physics Days: Annual Meeting of the Finnish Physical Society - Joensuu, Finland Duration: 14 Mar 2002 → 16 Mar 2002 Conference number: 36

Publication series

Name	XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002

Name	Selected papers / University of Joensuu, Department of Physics
Publisher	University of Joensuu
Number	7
ISSN (Print)	1236-0376

Conference

Conference	Physics Days
Country/Territory	Finland
City	Joensuu
Period	14/03/2002 → 16/03/2002

Keywords

High Q-value
resonator
RF-MEMES

Cite this

Rantakari, P., Koskenvuori, M., Lamminmäki, T., & Tittonen, I. (2002). High-Q micromechanical length extensional mode resonator. In J. Tervo, P. Pääkkönen, & M. Kuittinen (Eds.), Proceedings of the XXXVI annual conference of the Finnish Physical Society (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002), (Selected papers / University of Joensuu, Department of Physics; No. 7). University of Joensuu.

Rantakari, Pekka ; Koskenvuori, Mika ; Lamminmäki, Tuomas et al. / High-Q micromechanical length extensional mode resonator. Proceedings of the XXXVI annual conference of the Finnish Physical Society. editor / Jani Tervo ; Pertti Pääkkönen ; Markku Kuittinen. University of Joensuu, 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002). (Selected papers / University of Joensuu, Department of Physics; 7).

@inproceedings{b17540692f84443892e94c550c090843,

title = "High-Q micromechanical length extensional mode resonator",

keywords = "High Q-value, resonator, RF-MEMES, High Q-value, resonator, RF-MEMES, High Q-value, resonator, RF-MEMES",

author = "Pekka Rantakari and Mika Koskenvuori and Tuomas Lamminm{\"a}ki and Ilkka Tittonen",

year = "2002",

language = "English",

isbn = "952-458-110-8",

series = "XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002",

publisher = "University of Joensuu",

editor = "Jani Tervo and P{\"a}{\"a}kk{\"o}nen, {Pertti } and Markku Kuittinen",

booktitle = "Proceedings of the XXXVI annual conference of the Finnish Physical Society",

address = "Finland",

note = "Physics Days : Annual Meeting of the Finnish Physical Society ; Conference date: 14-03-2002 Through 16-03-2002",

}

Rantakari, P, Koskenvuori, M, Lamminmäki, T & Tittonen, I 2002, High-Q micromechanical length extensional mode resonator. in J Tervo, P Pääkkönen & M Kuittinen (eds), Proceedings of the XXXVI annual conference of the Finnish Physical Society. XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002, Selected papers / University of Joensuu, Department of Physics, no. 7, University of Joensuu, Physics Days, Joensuu, Finland, 14/03/2002.

High-Q micromechanical length extensional mode resonator. / Rantakari, Pekka; Koskenvuori, Mika; Lamminmäki, Tuomas et al.
Proceedings of the XXXVI annual conference of the Finnish Physical Society. ed. / Jani Tervo; Pertti Pääkkönen; Markku Kuittinen. University of Joensuu, 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002), (Selected papers / University of Joensuu, Department of Physics; No. 7).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - High-Q micromechanical length extensional mode resonator

AU - Rantakari, Pekka

AU - Koskenvuori, Mika

AU - Lamminmäki, Tuomas

AU - Tittonen, Ilkka

N1 - Conference code: 36

PY - 2002

Y1 - 2002

KW - High Q-value

KW - resonator

KW - RF-MEMES

KW - High Q-value

KW - resonator

KW - RF-MEMES

KW - High Q-value

KW - resonator

KW - RF-MEMES

M3 - Conference article in proceedings

SN - 952-458-110-8

T3 - XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002

BT - Proceedings of the XXXVI annual conference of the Finnish Physical Society

A2 - Tervo, Jani

A2 - Pääkkönen, Pertti

A2 - Kuittinen, Markku

PB - University of Joensuu

T2 - Physics Days

Y2 - 14 March 2002 through 16 March 2002

ER -

Rantakari P, Koskenvuori M, Lamminmäki T, Tittonen I. High-Q micromechanical length extensional mode resonator. In Tervo J, Pääkkönen P, Kuittinen M, editors, Proceedings of the XXXVI annual conference of the Finnish Physical Society. University of Joensuu. 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002). (Selected papers / University of Joensuu, Department of Physics; 7).