@article{5f0eeff91b744e37b6b9d755d833ecfb,
title = "High-permittivity YScO3 thin films by atomic layer deposition using two precursor approaches",
keywords = "atomic layer deposition, yttrium scandium oxide, high-k, atomic layer deposition, yttrium scandium oxide, high-k, atomic layer deposition, yttrium scandium oxide, high-k",
author = "Pia Myllym{\"a}ki and Minna Nieminen and Jaakko Niinist{\"o} and Matti Putkonen and Kaupo Kukli and Lauri Niinist{\"o}",
year = "2006",
language = "English",
volume = "16",
pages = "563--569",
journal = "Journal of Materials Chemistry",
issn = "0959-9428",
number = "6",
}