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He implantation to control B diffusion in crystalline and preamorphized Si
Elena Bruno, Salvo Mirabella, Francesco Priolo, Katja Kuitunen, Filip Tuomisto, Jonatan Slotte, Filippo Giannazzo, Corrado Bongiorno, Vito Raineri, Enrico Napolitani
Research output: Contribution to journal › Article › Scientific › peer-review
3
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