He Implantation Induced Nanovoids in Crystalline Si

Simo Kilpeläinen, Kimmo Kuitunen, Jonatan Slotte, Filip Tuomisto, E. Bruno, S. Mirabella, F. Priolo

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)164-167
Number of pages4
JournalJournal of Materials Science and Engineering B
Volume159-160
DOIs
Publication statusPublished - 15 Mar 2009
MoE publication typeA1 Journal article-refereed

Keywords

  • He implantation
  • positron
  • Si

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