Handbook of Silicon Based MEMS Materials and Technologies: Second Edition

Markku Tilli*, Teruaki Motooka, Veli Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos

*Corresponding author for this work

Research output: Book/ReportAnthologyScientificpeer-review

44 Citations (Scopus)

Abstract

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory.

Original languageEnglish
PublisherElsevier Inc.
Number of pages787
ISBN (Electronic)9780323312233
ISBN (Print)9780323299657
Publication statusPublished - 1 Jan 2015
MoE publication typeC2 Edited books

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  • Cite this

    Tilli, M., Motooka, T., Airaksinen, V. M., Franssila, S., Paulasto-Kröckel, M., & Lindroos, V. (2015). Handbook of Silicon Based MEMS Materials and Technologies: Second Edition. Elsevier Inc.