Handbook of silicon based MEMS materials and technologies

Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka

Research output: Book/ReportBookScientificpeer-review

Original languageEnglish
Place of PublicationBurlington, MA USA; Oxford UK
PublisherElsevier
ISBN (Print)978-0-8155-1594-4
Publication statusPublished - 2010
MoE publication typeC1 Separate scientific books

Keywords

  • MEMS
  • silicon

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