Handbook of silicon based MEMS materials and technologies

Research output: Book/ReportBook

Standard

Handbook of silicon based MEMS materials and technologies. / Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko.

2nd edition ed. London : Elsevier, 2015. 787 p.

Research output: Book/ReportBook

Harvard

Tilli, M, Motooka, T, Airaksinen, V-M, Franssila, S, Paulasto-Kröckel, M & Lindroos, V 2015, Handbook of silicon based MEMS materials and technologies. 2nd edition edn, Elsevier, London.

APA

Tilli, M., Motooka, T., Airaksinen, V-M., Franssila, S., Paulasto-Kröckel, M., & Lindroos, V. (2015). Handbook of silicon based MEMS materials and technologies. (2nd edition ed.) London: Elsevier.

Vancouver

Tilli M, Motooka T, Airaksinen V-M, Franssila S, Paulasto-Kröckel M, Lindroos V. Handbook of silicon based MEMS materials and technologies. 2nd edition ed. London: Elsevier, 2015. 787 p.

Author

Tilli, Markku ; Motooka, Teruaki ; Airaksinen, Veli-Matti ; Franssila, Sami ; Paulasto-Kröckel, Mervi ; Lindroos, Veikko. / Handbook of silicon based MEMS materials and technologies. 2nd edition ed. London : Elsevier, 2015. 787 p.

Bibtex - Download

@book{d263620d37624e2caa4f85138aaae307,
title = "Handbook of silicon based MEMS materials and technologies",
keywords = "materials, MEMS, silicon",
author = "Markku Tilli and Teruaki Motooka and Veli-Matti Airaksinen and Sami Franssila and Mervi Paulasto-Kr{\"o}ckel and Veikko Lindroos",
year = "2015",
language = "English",
isbn = "978-0-323-29965-7",
publisher = "Elsevier",
edition = "2nd edition",

}

RIS - Download

TY - BOOK

T1 - Handbook of silicon based MEMS materials and technologies

AU - Tilli, Markku

AU - Motooka, Teruaki

AU - Airaksinen, Veli-Matti

AU - Franssila, Sami

AU - Paulasto-Kröckel, Mervi

AU - Lindroos, Veikko

PY - 2015

Y1 - 2015

KW - materials

KW - MEMS

KW - silicon

M3 - Book

SN - 978-0-323-29965-7

BT - Handbook of silicon based MEMS materials and technologies

PB - Elsevier

CY - London

ER -

ID: 1465698