Handbook of silicon based MEMS materials and technologies

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Details

Original languageEnglish
Place of PublicationLondon
PublisherElsevier
Number of pages787
Edition2nd edition
ISBN (Print)978-0-323-29965-7
Publication statusPublished - 2015
MoE publication typeD5 Text book, professional manual or guide or a dictionary

    Research areas

  • materials, MEMS, silicon

ID: 1465698