Handbook of silicon based MEMS materials and technologies

Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos

Research output: Book/ReportBookProfessional

Original languageEnglish
Place of PublicationLondon
Number of pages787
Edition2nd edition
ISBN (Print)978-0-323-29965-7
Publication statusPublished - 2015
MoE publication typeD5 Text book, professional manual or guide or a dictionary


  • materials
  • MEMS
  • silicon


  • Cite this

    Tilli, M., Motooka, T., Airaksinen, V-M., Franssila, S., Paulasto-Kröckel, M., & Lindroos, V. (2015). Handbook of silicon based MEMS materials and technologies. (2nd edition ed.) London: Elsevier.