@article{8dfe1341aa214d5397d5913b612e2138,
title = "Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model",
keywords = "ALD, atomic layer deposition, chemisorption, growth per cycle, model, steric hindrance, ALD, atomic layer deposition, chemisorption, growth per cycle, model, steric hindrance, ALD, atomic layer deposition, chemisorption, growth per cycle, model, steric hindrance",
author = "Riikka Puurunen",
year = "2003",
language = "English",
volume = "9",
pages = "249--257",
journal = "Chemical Vapor Deposition",
issn = "1521-3862",
publisher = "Wiley-VCH Verlag",
number = "5",
}