Growth parameter optimization for high nitrogen content Ga(In)NAs by MOVPE

Marco Mattila; Jaakko Sormunen; Markku Sopanen; Harri Lipsanen

Growth parameter optimization for high nitrogen content Ga(In)NAs by MOVPE

Marco Mattila, Jaakko Sormunen, Markku Sopanen, Harri Lipsanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	12th International Conference on Metal Organic Vapor Phase Epitaxy 30.5-4.6.2004
Publication status	Published - 2004
MoE publication type	A4 Conference publication

Keywords

GaAsn
GaInNAs
growth pressure
high nitrogen content

Cite this

@inproceedings{086d9634b2f94b73ae720026be978448,

title = "Growth parameter optimization for high nitrogen content Ga(In)NAs by MOVPE",

keywords = "GaAsn, GaInNAs, growth pressure, high nitrogen content, GaAsn, GaInNAs, growth pressure, high nitrogen content, GaAsn, GaInNAs, growth pressure, high nitrogen content",

author = "Marco Mattila and Jaakko Sormunen and Markku Sopanen and Harri Lipsanen",

year = "2004",

language = "English",

booktitle = "12th International Conference on Metal Organic Vapor Phase Epitaxy 30.5-4.6.2004",

}

TY - GEN

T1 - Growth parameter optimization for high nitrogen content Ga(In)NAs by MOVPE

AU - Mattila, Marco

AU - Sormunen, Jaakko

AU - Sopanen, Markku

AU - Lipsanen, Harri

PY - 2004

Y1 - 2004

KW - GaAsn

KW - GaInNAs

KW - growth pressure

KW - high nitrogen content

KW - GaAsn

KW - GaInNAs

KW - growth pressure

KW - high nitrogen content

KW - GaAsn

KW - GaInNAs

KW - growth pressure

KW - high nitrogen content

M3 - Conference article in proceedings

BT - 12th International Conference on Metal Organic Vapor Phase Epitaxy 30.5-4.6.2004

ER -