Growth parameter optimization for high nitrogen content Ga(In)NAs by MOVPE

Marco Mattila, Jaakko Sormunen, Markku Sopanen, Harri Lipsanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication12th International Conference on Metal Organic Vapor Phase Epitaxy 30.5-4.6.2004
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • GaAsn
    • GaInNAs
    • growth pressure
    • high nitrogen content

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