Growth of ZnMnO films at low temperatures by Atomic Layer Deposition

A. Wo´jcik, M. Godlewski, K. Kopalko, E. Guziewicz, R. Jakiela, R. Minikayev, W. Paszkowicz, M. Klepka, Matti Putkonen, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th International Workshop on ZnO and Related Materials, Germany, October 3-6, 2006
    PublisherUniversity of Giessen, Germany, Science Campus
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Cite this

    Wo´jcik, A., Godlewski, M., Kopalko, K., Guziewicz, E., Jakiela, R., Minikayev, R., Paszkowicz, W., Klepka, M., Putkonen, M., & Niinistö, L. (2007). Growth of ZnMnO films at low temperatures by Atomic Layer Deposition. In The 4th International Workshop on ZnO and Related Materials, Germany, October 3-6, 2006 University of Giessen, Germany, Science Campus.