@article{3597c6fafe37466fa2b021ec3887d903,
title = "Growth of Yttrium Oxide thin Films from B-diketonate precursor",
keywords = "atomic force microscopy, atomic layer epitaxy, B-diketonate precursor, yttrium oxide, atomic force microscopy, atomic layer epitaxy, B-diketonate precursor, yttrium oxide, atomic force microscopy, atomic layer epitaxy, B-diketonate precursor, yttrium oxide",
author = "H. M{\"o}ls{\"a} and L. Niinist{\"o} and M. Utriainen",
year = "1994",
language = "English",
volume = "4",
pages = "389--400",
journal = "Advanced Materials for Optics and Electronics",
issn = "1057-9257",
}