Growth of Yttrium Oxide thin Films from B-diketonate precursor

H. Mölsä, L. Niinistö, M. Utriainen

    Research output: Contribution to journalArticleScientificpeer-review

    41 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)389-400
    JournalAdvanced Materials for Optics and Electronics
    Volume4
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic force microscopy
    • atomic layer epitaxy
    • B-diketonate precursor
    • yttrium oxide

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