Growth of YScO3 thin films by atomic layer deposition

Pia Myllymäki; Minna Nieminen; Matti Putkonen; Lauri Niinistö

Growth of YScO₃ thin films by atomic layer deposition

Pia Myllymäki
, Minna Nieminen
, Matti Putkonen
, Lauri Niinistö

Research output: Working paper › Professional

Original language	English
Place of Publication	Helsinki
Publication status	Published - 2004
MoE publication type	D4 Published development or research report or study

Publication series

Name	The AVS Topical Conference on Atomic Layer Deposition (ALD 2004), Helsinki, Finland, August, 16-18, 2004
Publisher	American vacuum society (AVS)

Keywords

atomic layer deposition
thin film
yttrium scandium oxide

Cite this

@techreport{a400f893e8a94d0889aae44c98cc0d27,

title = "Growth of YScO3 thin films by atomic layer deposition",

keywords = "atomic layer deposition, thin film, yttrium scandium oxide, atomic layer deposition, thin film, yttrium scandium oxide, atomic layer deposition, thin film, yttrium scandium oxide",

author = "Pia Myllym{\"a}ki and Minna Nieminen and Matti Putkonen and Lauri Niinist{\"o}",

year = "2004",

language = "English",

series = "The AVS Topical Conference on Atomic Layer Deposition (ALD 2004), Helsinki, Finland, August, 16-18, 2004",

publisher = "American vacuum society (AVS)",

type = "WorkingPaper",

institution = "American vacuum society (AVS)",

}

TY - UNPB

T1 - Growth of YScO3 thin films by atomic layer deposition

AU - Myllymäki, Pia

AU - Nieminen, Minna

AU - Putkonen, Matti

AU - Niinistö, Lauri

PY - 2004

Y1 - 2004

KW - atomic layer deposition

KW - thin film

KW - yttrium scandium oxide

KW - atomic layer deposition

KW - thin film

KW - yttrium scandium oxide

KW - atomic layer deposition

KW - thin film

KW - yttrium scandium oxide

M3 - Working paper

T3 - The AVS Topical Conference on Atomic Layer Deposition (ALD 2004), Helsinki, Finland, August, 16-18, 2004

BT - Growth of YScO3 thin films by atomic layer deposition

CY - Helsinki

ER -