Growth of YScO3 thin films by atomic layer deposition

Pia Myllymäki, Minna Nieminen, Matti Putkonen, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe AVS Topical Conference on Atomic Layer Deposition (ALD 2004), Helsinki, Finland, August, 16-18, 2004
    PublisherAmerican vacuum society (AVS)

    Keywords

    • atomic layer deposition
    • thin film
    • yttrium scandium oxide

    Cite this

    Myllymäki, P., Nieminen, M., Putkonen, M., & Niinistö, L. (2004). Growth of YScO3 thin films by atomic layer deposition. (The AVS Topical Conference on Atomic Layer Deposition (ALD 2004), Helsinki, Finland, August, 16-18, 2004).