Growth of titanium dioxide thin films by atomic layer epitaxy

M. Ritala, M. Leskelä, E. Nykänen, P. Soininen, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    283 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)288-295
    JournalThin Solid Films
    Publication statusPublished - 1993
    MoE publication typeA1 Journal article-refereed


    • atomic layer epitaxy (ALE)
    • RBS
    • spectrophotometry
    • thin films
    • titanium dioxide
    • XRD

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