Growth of tin dioxide films by atomic layer epitaxy

H. Viirola, L. Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationTartu
    Publication statusPublished - 1993
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameTKK-Tartu Ülikool 2nd ALE Symposium
    PublisherTartu Ülikool

    Keywords

    • atomic layer epitaxy (ALE)
    • thin films
    • tin dioxide

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