Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

Mika Vähä-Nissi, E. Kauppi, K. Sahagian, L-S. Johansson, M.S. Peresin, Jenni Sievänen, A. Harlin

Research output: Contribution to journal › Article › Scientific › peer-review

15 Citations (Scopus)

Access to Document

@article{a7d341f963ef4ceaa7b7b0b22680cd7c,

title = "Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition",

author = "Mika V{\"a}h{\"a}-Nissi and E. Kauppi and K. Sahagian and L-S. Johansson and M.S. Peresin and Jenni Siev{\"a}nen and A. Harlin",

note = "VK: T10402",

year = "2012",

doi = "10.1016/j.tsf.2012.09.043",

language = "English",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier Science",

number = "1",

}

TY - JOUR

T1 - Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

AU - Vähä-Nissi, Mika

AU - Kauppi, E.

AU - Sahagian, K.

AU - Johansson, L-S.

AU - Peresin, M.S.

AU - Sievänen, Jenni

AU - Harlin, A.

N1 - VK: T10402

PY - 2012

Y1 - 2012

U2 - 10.1016/j.tsf.2012.09.043

DO - 10.1016/j.tsf.2012.09.043

M3 - Article

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1

ER -