Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition

Mika Vähä-Nissi, E. Kauppi, K. Sahagian, L-S. Johansson, M.S. Peresin, Jenni Sievänen, A. Harlin

    Research output: Contribution to journalArticleScientificpeer-review

    15 Citations (Scopus)
    Original languageEnglish
    JournalThin Solid Films
    Issue number1
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

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