Growth of rare-earth oxide thin films for electronic applications by atomic layer deposition

Lauri Niinistö, Jani Päiväsaari

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{4904495940ae4451b11d273b23059e0a,

title = "Growth of rare-earth oxide thin films for electronic applications by atomic layer deposition",

keywords = "ALD, ALE, thin films, ALD, ALE, thin films, ALD, ALE, thin films",

author = "Lauri Niinist{\"o} and Jani P{\"a}iv{\"a}saari",

year = "2001",

language = "English",

volume = "12",

pages = "1--3",

journal = "Eres Newsletter",

number = "2",

}