Growth of rare-earth oxide thin films for electronic applications by atomic layer deposition

Lauri Niinistö, Jani Päiväsaari

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)1-3
    JournalEres Newsletter
    Volume12
    Issue number2
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • ALE
    • thin films

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