Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

M. Nieminen, L. Niinistö, E. Rauhala

    Research output: Contribution to journalArticleScientificpeer-review

    65 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)27-31
    JournalJournal of Materials Chemistry
    Volume6
    Publication statusPublished - 1996
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • gallium oxide
    • thin films

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