| Original language | English |
|---|---|
| Publication status | Published - 22 Jun 2015 |
| MoE publication type | Not Eligible |
| Event | International Conference on Atomic Layer Deposition - Oregon, Portland, United States Duration: 28 Jun 2015 → 1 Jul 2015 Conference number: 15 |
Conference
| Conference | International Conference on Atomic Layer Deposition |
|---|---|
| Abbreviated title | ALD |
| Country/Territory | United States |
| City | Portland |
| Period | 28/06/2015 → 01/07/2015 |
Equipment
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Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical EngineeringFacility/equipment: Facility
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