Growth of conductive copper sulfide thin films by atomic layer deposition

Johanna Johansson, Juhana Kostamo, Maarit Karppinen, Lauri Niinistö

    Research output: Contribution to journalArticle

    93 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1022-1026
    JournalJournal of Materials Chemistry
    Volume12
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • copper sulfide
    • thin films

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