Growth of aluminium nitride on porous silica from trimethylaluminium and ammonia precursors by the ALCVD technique

R.L. Puurunen, S. Haukka, E.I. Iiskola, A.O.I. Krause

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationALE/ALENET WORKSHOP on synthesis and analysis of atomic and molecular surface structures, Helsinki, 20.-22.6.1999
    Pages1
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • aluminium nitride
    • atomic layer chemical vapour deposition
    • catalyst

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