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Green Lithography for Delicate Materials
Artem Grebenko, Anton Bubis, Konstantin Motovilov, Viacheslav Dremov, Evgeny Korostylev, Ivan Kindiak, Fedor S. Fedorov, Sergey Luchkin, Yuliya Zhuikova, Aleksandr Trofimenko, Gleb Filkov, Georgiy Sviridov, Andrey Ivanov, Jordan T. Dull, Rais Mozhchil, Andrey Ionov, Valery Varlamov, Barry P. Rand, Vitaly Podzorov, Albert G. Nasibulin*
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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