Glass Polarization Induced Drift in Microelectromechanical Capacitor

Antti Haarahiltunen, Aapo Varpula, Jouni Leinvuo, Esko Siren, Vesa-Pekka Rytkönen, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
174 Downloads (Pure)
Original languageEnglish
JournalJournal of Applied Physics
Volume111
Issue number10
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Keywords

  • capacitance
  • capacitors
  • glass
  • microswitches

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