Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation And Annealing

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Keywords

@article{9db7f173f2ba4e81b5040c690ad65187,

title = "Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation And Annealing",

keywords = "contamination, gettering, silicon, contamination, gettering, silicon, contamination, gettering, silicon",

author = "M. Yli-Koski and J. Mellin and V. Ovchinnikov",

year = "1999",

language = "English",

volume = "69-70",

pages = "291--294",

journal = "Solid-State Phenomena",

issn = "1662-9779",

publisher = "Scientific.net",

}

TY - JOUR

T1 - Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation And Annealing

AU - Yli-Koski, M.

AU - Mellin, J.

AU - Ovchinnikov, V.

PY - 1999

Y1 - 1999

KW - contamination

KW - gettering

KW - silicon

KW - contamination

KW - gettering

KW - silicon

KW - contamination

KW - gettering

KW - silicon

M3 - Article

SN - 1662-9779

VL - 69-70

SP - 291

EP - 294

JO - Solid-State Phenomena

JF - Solid-State Phenomena

ER -