Gettering of iron in silicon by boron implantation

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Original languageEnglish
Pages (from-to)S41-S45
JournalJournal of Materials Science: Materials in Electronics
Volume19
Issue number1
Publication statusPublished - 2008
MoE publication typeA1 Journal article-refereed

    Research areas

  • boron, gettering, iron, silicon

ID: 3469162