Gettering of iron in silicon by boron implantation

Antti Haarahiltunen, Heli Talvitie, Hele Savin, O. Anttila, Marko Yli-Koski, M. I. Asghar, Juha Sinkkonen

    Research output: Contribution to journalArticleScientificpeer-review

    15 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)S41-S45
    JournalJournal of Materials Science: Materials in Electronics
    Volume19
    Issue number1
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • boron
    • gettering
    • iron
    • silicon

    Cite this